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    高温压电晶体制备及 MEMS 压力传感器研制

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    • Project Name:高温压电晶体制备及 MEMS 压力传感器研制

    • Institution:晶体材料研究院（晶体材料全国重点实验室）

    • Leading Scientist:于法鹏

    • Supported by:2022 National Key R&D Program for Technology-based Small and Medium-sized Enterprises Project -- Qingdao Xinsheng Micro-Nano Electronics Technology Co., Ltd.

    • Nature of Project:纵向

    • Project Level:National

    • Project Number:0F0B34054B0A7FFBE063BE07C2CA82D8

    • Project Approval Number:2023YFB3210700

    • Date of Project Approval:2023-12-01

    • Scheduled Completion Time:2026-11-30

    • Date of Project Completion:2026-11-30

    • Date of Project Initiation:2023-12-01

    • Release Time:2024-04-17
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