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高温压电晶体制备及 MEMS 压力传感器研制

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  • Affiliation of Participant(s):晶体材料研究院

  • Leading Scientist:于法鹏

  • Supported by:2022年国家重点研发计划科技型中小企业项目-- 青岛芯笙微纳电子科技有限公司

  • Nature of Project:纵向

  • Project level:National

  • Project Number:0F0B34054B0A7FFBE063BE07C2CA82D8

  • Project Approval Number:2023YFB3210700

  • Date of Project Approval:2023-12-01

  • Date of Project Initiation:2023-12-01

  • Scheduled completion time:2026-11-30

  • Date of Project Completion:2026-11-30

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