Project Name:半导体晶圆缺陷检测仪器制备技术

Institution:晶体材料研究院（晶体材料全国重点实验室）

Leading Scientist:于浩海

Supported by:2022 Shandong Provincial Key R&D Program (Major Scientific and Technological Innovation Project)

Nature of Project:纵向

Project Level:省、部委级

Project Number:E045539D9A7B0A42E053BE07C2CA71BA

Project Approval Number:2022CXGC010104

Date of Project Approval:2022-02-01

Scheduled Completion Time:2025-02-28

Date of Project Completion:2025-02-28

Date of Project Initiation:2022-02-01

Release Time:2024-04-16