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Affiliation of Author(s):晶体材料研究所
Journal:光学精密工程
Key Words:光学加工;;Yb∶LuScO_3;;表面面形;;表面粗糙度;;树脂铜盘
All the Authors:yuhaohai
First Author:沈冯峰
Indexed by:Unit Twenty Basic Research
Document Code:81600
Issue:10
Translation or Not:no
Date of Publication:2018-10-15