Project Name: : 面向半导体缺陷检测的深紫外晶体及激光装备研发（子课题2）

Affiliation of Participant(s): : 物理学院

Leading Scientist: : 张彬

Nature of Project: : 纵向

Project Number: : 27F02E58464305B8E063BE07C2CAF096

Date of Project Approval: : 2025-01-01

Scheduled completion time: : 2027-12-31

Date of Project Completion: : 2027-12-31

Date of Project Initiation: : 2025-01-01

Project Approval Number: : 2024ZLGX02-3