Effect of nitrogen doping concentration on 4H-SiC laser slicing

Release time:2025-05-24|Hits:

Affiliation of Author(s):新一代半导体材料研究院

Journal:Journal of the American Ceramic Society

First Author:陈秋

Document Code:F446042385FF456791A778937BB905AA

Issue:e20555

Number of Words:3

Translation or Not:no

Date of Publication:2025-04-04