Numerical Simulation Analysis of Laser Ultrasonic Detection of Defects in Silicon Carbide

Release time:2025-05-27|Hits:

Affiliation of Author(s):新一代半导体材料研究院

Journal:CRYSTALS

First Author:殷媛

Document Code:885F105F47474333811B638EDA765D34

Issue:2

Number of Words:8

Translation or Not:no

Date of Publication:2025-01-21