
Title:Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title of Award : Enhanced adhesion and electrical properties of TiN/Cu metallization on Si3N4 ceramic substrates via magnetron sputtering
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Institution:国家胶体材料工程技术研究中心
Title of Paper:Enhanced adhesion and electrical properties of TiN/Cu metallization on Si3N4 ceramic substrates via magnetron sputtering
Journal:Ceramic International
First Author:陈嘉成
All the Authors:李彦芳
Document Code:18038F61789340C4BFA71D2A34D1614A
Issue:10
Number of Words:5
Translation or Not:No
Date of Publication:2025-10
Release Time:2025-11-07
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