Title : Effects of gate roughness on low voltage InGaZnO thin-film transistors with ultra-thin anodized AlxOy dielectrics

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Affiliation of Author(s):微电子学院

Title of Paper:Effects of gate roughness on low voltage InGaZnO thin-film transistors with ultra-thin anodized AlxOy dielectrics

Journal:Semiconductor Science and Technology

First Author:林晓昱

Document Code:D140F3F28B5E40BDBCD2400A9D2DFD08

Issue:38

Page Number:35023

Number of Words:3500

Translation or Not:no

Date of Publication:2023-02-17