高效精准可控的半导体膜状扩散源研发及产业化
Release Time:2024-04-16
Hits:
- Project Name:
- 高效精准可控的半导体膜状扩散源研发及产业化
- Institution:
- 集成电路学院
- Leading Scientist:
- 王卿璞
- Nature of Project:
- 纵向
- Project Level:
- 省、部委级
- Project Number:
- EFB1C2B9EFA95D60E053BE07C2CA55BE
- Project Approval Number:
- 2022TSGC1093
- Date of Project Approval:
- 2022-08-01
- Scheduled Completion Time:
- 2024-07-31
- Date of Project Completion:
- 2024-07-31
- Date of Project Initiation:
- 2022-08-01
- Release Time:
- 2024-04-16
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