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采用射频磁控溅射法在Si (111) 衬底上生长β-Ga2O3 薄膜

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Affiliation of Author(s):物理学院

Journal:《功能材料》

All the Authors:luancaina,Ma Jin,linzhaojun,Fujian Zong,zhangxijian

First Author:xiaohongdi

Indexed by:Unit Twenty Basic Research

Document Code:lw-73891

Volume:v 37

Issue:n SUPPL.

Page Number:1

Translation or Not:no

Date of Publication:2006-10-15

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