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非晶硅改性层的内循环式粘弹性流体超光滑抛光理论与技术研究

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  • Affiliation of Participant(s):机械工程学院

  • Leading Scientist:Peng Yao

  • Supported by:省科技厅

  • Nature of Project:纵向

  • Project level:省、部委级

  • Project Participants:Peng Yao,zoubin,zhuhongtao,liuyue,zhangzhenzhong

  • Project Number:kyxm-69081

  • Project Approval Number:ZR2018MEE019

  • Date of Project Approval:2018-04-01

  • Date of Project Initiation:2018-03-01

  • Scheduled completion time:2021-07-01

  • Date of Project Completion:2021-07-01

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