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Home > Scientific Research > Paper Publications

An investigation of distribution parameters for fluorine ion implantation in indium-tin-oxide films

Release Time:2019-10-24 Hits:

Institution:物理学院
Journal:Applied Physics A: Materials Science and Proc
First Author:刘向东
All the Authors:赵明文,刘向东
Document Code:lw-76327
Volume:81
Issue:3
Page Number:635
Translation or Not:No
Date of Publication:2005-10

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