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低温等离子体辅助MOCVD技术制备AlInN薄膜材料的生长及掺杂特性研究
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Project Name:低温等离子体辅助MOCVD技术制备AlInN薄膜材料的生长及掺杂特性研究

Institution:物理学院

Leading Scientist:计峰

Supported by:国家基金委

Nature of Project:纵向

Project Level:National

Project Participants:计峰,计峰,Fujian Zong,栾彩娜,Xijian Zhang

Project Number:kyxm-14368

Project Approval Number:51072101

Date of Project Approval:2011-01-01

Scheduled Completion Time:2013-12-31

Date of Project Completion:2013-12-31

Date of Project Initiation:2011-01-01

Release Time:2019-04-18

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Professor

Gender : Male

Alma Mater : Shandong University

Education Level : With Certificate of Graduation for Doctorate Study

Degree : Doctoral Degree in Science

Status : Employed

School/Department : School of Microelectronics

Date of Employment : 1987-05-01

Faculty/School : School of Integrated Circuits,Shandong University

Business Address : 3B-217

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