Title of Project : 非晶硅改性层的内循环式粘弹性流体超光滑抛光理论与技术研究

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Project Name:非晶硅改性层的内循环式粘弹性流体超光滑抛光理论与技术研究

Affiliation of Participant(s):机械工程学院

Leading Scientist:Peng Yao

Supported by:省科技厅

Nature of Project:纵向

Project level:省、部委级

Project Participants:Peng Yao,Peng Yao,zoubin,zhuhongtao,liuyue,zhangzhenzhong

Project Number:kyxm-69081

Date of Project Approval:2018-04-01

Scheduled completion time:2021-07-01

Date of Project Completion:2021-07-01

Date of Project Initiation:2018-03-01

Project Approval Number:ZR2018MEE019