Title : Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching

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Affiliation of Author(s):机械工程学院

Title of Paper:Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching

Journal:Optics &Laser Technology

First Author:王庆伟

Document Code:1737380911723769857

Volume:169

Number of Words:5000

Translation or Not:no

Date of Publication:2024-02-01