Title : Modeling and optimizing of laser-assisted waterjet process parameters for near-damage-free micromachining of monocrystalline silicon

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Affiliation of Author(s):机械工程学院

Title of Paper:Modeling and optimizing of laser-assisted waterjet process parameters for near-damage-free micromachining of monocrystalline silicon

Journal:Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

First Author:刘雪飞

Document Code:090DFE631BA04A5DA5422442448D61D8

Issue:DOI:10.1177/09544054241245763

Number of Words:6273

Translation or Not:no

Date of Publication:2024-04-29