Title : The evolution mechanism of femtosecond laser-induced periodic structure on monocrystalline silicon with scanning rate and the associated material rearrangement process
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Affiliation of Author(s):机械工程学院
Title of Paper:The evolution mechanism of femtosecond laser-induced periodic structure on monocrystalline silicon with scanning rate and the associated material rearrangement process
Journal:Materials Science in Semiconductor Processing
First Author:刘雪飞
Document Code:2E95B69D5A724BEC89DB59D4685F19A3
Issue:197
Number of Words:6
Translation or Not:no
Date of Publication:2025-05-31
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