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Title : 一种制备均匀薄膜的复合涂布装置及方法

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Title:一种制备均匀薄膜的复合涂布装置及方法

Affilication of Author(s):机械工程学院

Type of Patent:发明

Application Number:202011382674.4

Number of Inventors:5

Service Invention or Not:no

Application Date:2020-12-01

Publication Date:2022-04-12

Authorization Date:2022-04-12

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