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Affiliation of Author(s):电气工程学院
Journal:等离子体科学和技术（英文版）（中国科学院）
First Author:吕悦
Document Code:4D3FBF29834F405C951E5FC2078ADEAD
Volume:23
Issue:5
Number of Words:50000
Translation or Not:no
Date of Publication:2021-05-01
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