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Fabrication of a polycrystalline SiGe-and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate
  • Journal:
    Semiconductor Science and Technology
  • All the Authors:
    Dongxue Liang,Zhiwei Huang,Chunyu Yu,Peng Cui,Jie Zhang,Jianyuan Wang,Jianfang Xu,Songyan Chen,Cheng Li
  • First Author:
    Guangyang Lin
  • Indexed by:
    Journal paper
  • Correspondence Author:
    Yuping Zeng
  • Volume:
    35
  • Issue:
    9
  • Page Number:
    095016
  • Translation or Not:
    no
  • Included Journals:
    SCI
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