张锡健

副教授

硕士生导师

个人简介

个人经历

  • 2016.03 -- 至今

    山东大学  ,集成电路学院

  • 2006.07 -- 2016.03

    山东大学  ,物理与微电子学院

  • 2001.09 -- 2006.07

    山东大学 

  • 1997.09 -- 2001.09

    山东大学 

授课信息

本科生课程名称 学期 学分 课程号

超大规模集成电路制造工艺

秋学期

3.0

0230082

半导体器件设计与仿真

春学期

3.0

sd04030240

集成电路工艺和器件的计算机模拟

春学期

2.0

0230065

集成电路制造工艺

秋学期

3.0

0230054

半导体物理

春学期

3.0

sd04030140

集成电路工艺

春学期

2.0

sd04030380

模拟电子技术实验

春学期

2.0

sd04020090

高频电子线路实验

春学期

1.5

sd04031190

半导体器件设计与仿真

秋学期

3.0

sd04030240

数字电子技术实验

秋学期

2.0

sd04031340

科研方向

名称 简介

研究方向

薄膜半导体器件及微纳集成电路

科研项目

项目名称 项目周期

基于柔性薄膜的 6G 太赫兹芯片与三维电路集成的研究(子课题2)

2024/01/01,2026/12/30

BM晶体管V2技术合作项目

2023/09/01,2024/12/31

基于薄膜IGZO和LCP的共形太赫兹智能超表面的研究

2023/08/24,2027/12/31

一种高可靠性玻珠复合二极管芯片的研发与产业化

2023/07/01,2025/07/31

毫米波与太赫兹测试仪器核心芯片研制与应用示范

2023/02/01,2025/12/31

超薄非接触式芯片模块制造方法研究

2023/01/01,2025/12/31

石英芯片制备工艺研究

2022/12/15,2025/12/15

高效精准可控的半导体膜状扩散源研发及产业化

2022/08/01,2024/07/31

DRAM器件设计与仿真

2022/03/10,2023/09/10

太赫兹量子波成像技术智能安检系统的产业化应用

2019/01/06,2021/12/31

基于有机激基复合物的自旋发光二极管器件基础研究

2018/04/01,2021/07/01

高效柔性GaSbxAs1-x纳米线阵列太阳能电池的制作技术基础研究

2017/08/01,2020/06/30

稀土掺杂磁性小分子的磁性机理研究

2015/01/01,2016/12/31

脉冲激光沉积法高效氧化亚铜基太阳能电池技术探索

2014/12/01,2017/12/31

二氧化钛外延单晶薄膜的制备及其特性研究

2014/08/15,2018/12/31

硬质合金刀具微尺度刃口涂层技术与创成方法研究

2014/08/15,2018/12/31

基于SnO的p型氧化物半导体的开发与能带结构研究

2013/10/01,2016/10/31

半导体纳米结构中等离子体波的物理研究及超高速电子器件探索

2013/08/15,2017/12/31

关于掺杂实现有效p型金属氧化物半导体及其导电机理的探索

2013/08/15,2016/12/31

具有纳米空腔的大面积柔性GaN基LED的制备及特性研究

2013/08/15,2017/12/31

局域氧空位分布及其对阻变存储器细丝导通机制的影响研究

2013/08/15,2017/12/31

高质量氮化锌薄膜的制备及氮化锌薄膜晶体管的构建研究

2012/08/17,2016/12/31

HCN及HOCN势能面和准经典轨线计算研究

2012/07/31,2015/07/31

高效无镉太阳能电池MgZnO缓冲层特性研究

2011/07/01,2014/07/01

低温等离子体辅助MOCVD技术制备AlInN薄膜材料的生长及掺杂特性研究

2011/01/01,2013/12/31

铜铟镓硒太阳能电池无镉缓冲层研究

2010/06/01,2012/12/01

新型CIGS薄膜太阳能电池应用研究

2009/01/01,2011/12/31

高质量锌锡氧化物透明导电薄膜的制备

2007/12/01,2010/12/31

偶氮类分子/LMH纳米复合材料的制备及性能研究

2007/12/01,2010/12/31

主要论文

【1】.Narrowband SIW-SSPP Hybrid Bandpass Filter With Compact Profile at Ka-BandNarrowband SIW-SSPP Hybrid Bandpass Filter With Compact Profile at Ka-Band. IEEE Access1, 11:98305,2023.

【2】.Narrowband SIW-SSPP hybrid Bandpass Filter with Compact Profile at Ka-bandIEEE ACCESS:98305,2023.

【3】.A Universal Approach to Determine the Atomic Layer Numbers in Two-Dimensional Materials Using Dark-Field Optical Contrast. Nano Letters, 23:9170,2023.

【4】.Polarization-selective modulation of meandered-line metamaterials with graphene surface plasmonicsOptics and Lasers in Engineering:107693,2023.

【5】.Polarization-selective modulation of meandered-line metamaterials with graphene surface plasmonicsOptics and Lasers in Engineering:107693,2023.

【6】崔灿.Active and Programmable Metasurfaces with Semiconductor Materials and DevicesCrystals:279,2023.

【7】崔灿.Active and Programmable Metasurfaces with Semiconductor Materials and DevicesCrystals:279,2023.

【8】冯明明.Active metal-graphene hybrid terahertz surface plasmon polaritons. NANOPHOTONICS, 11:3331-3338,2022.

【9】庞智勇.Observation of up-conversion fluorescence from exciplex of m-MTDATA: TPBi blend. JOURNAL OF LUMINESCENCE Journal, 243:118655,2022.

【10】Yuan, Huimin.Effect of Electron and Hole Injection on Spin Polarization in Bis-(8-hydroxyquinoline) Zinc Molecule. JOURNAL OF SUPERCONDUCTIVITY AND NOVEL MAGNETISM, 35:455,2022.

【11】周泽鹏.Flexible Liquid Crystal Polymer Technologies from Microwave to Terahertz Frequencies. Molecules, 27,2022.

【12】尉渊.All-round performance improvement of semitransparent perovskite solar cells by a pressure-assisted method. JOURNAL OF MATERIALS CHEMISTRY C, 9:15056,2021.

【13】Yu, Yuan.All-round performance improvement of semitransparent perovskite solar cells by a pressure-assisted method. Journal of Materials Chemistry C, 9:15056-15064,2021.

【14】凌昊天.Active terahertz metamaterials electrically modulated by InGaZnO Schottky diodes. Optical Materials Express, 11:2966,2021.

【15】张锡健 and 张翼飞.Solution-Processed TiO2-Based Schottky Diodes With a Large Barrier Height. IEEE Electron Device Letters, 40:1378,2019.

【16】张锡健, 冯先进, 宋爱民 and 刘晓辉.Pulsed-laser-deposited, single-crystalline Cu2O films with low resistivity achieved through manipulating the oxygen pressure. Applied surface science, 435:305,2018.

【17】张锡健, 冯先进, 宋爱民 and 刘晓辉.Pulsed-laser-deposited, single-crystalline Cu2O films with low resistivity achieved through manipulating the oxygen pressure. Applied Surface Science, 435:305,2018.

【18】马瑾, 张锡健, 栾彩娜, 冯先进, 宋爱民 and 刘晓辉.Cu2O epitaxial films with domain structures prepared on Y-stabilized ZrO2 substrates by pulsed laser deposition. Ceramics International, 43:15500,2017.

【19】张磊, 张锡健 and 周洋.硬质合金刀具类金刚石涂层及其性能评价. 硬质合金, 34:384,2017.

【20】马瑾, 张锡健, 栾彩娜, 冯先进, 宋爱民 and 刘晓辉.Cu2O epitaxial films with domain structures prepared on Y-stabilized ZrO2 substrates by pulsed laser deposition. Ceramics International, 43:15500,2017.

【21】张磊, 张锡健 and 周洋.硬质合金刀具类金刚石涂层及其性能评价. 硬质合金, 34:384,2017.

【22】马瑾, 张锡健, 栾彩娜, 冯先进, 宋爱民 and 刘晓辉.Cu2O epitaxial films with domain structures prepared on Y-stabilized ZrO2 substrates by pulsed laser deposition. Ceramics International, 43:15500,2017.

【23】张锡健, 李玉香, 陈秀芳, 徐现刚, 赵显, 宋爱民 and 杨乐陶.Thermally Evaporated SiO Serving as Gate Dielectric in Graphene Field-Effect Transistors. IEEE Transactions on Electron Devices, 64:1846,2017.

【24】张锡健, 李玉香, 陈秀芳, 徐现刚, 赵显, 宋爱民 and 杨乐陶.Thermally Evaporated SiO Serving as Gate Dielectric in Graphene Field-Effect Transistors. IEEE Transactions on Electron Devices, 64:1846,2017.

【25】张锡健 and 庞智勇.Room temperature ferromagnetic properties of Al-doped bis(8-hydroxyquinoline)cobalt (Coq2) molecules. Journal of magnetism and magnetic materials, 387:155,2015.

【26】庞智勇 and 张锡健.Room temperature ferromagnetic properties of Al-doped bis(8-hydroxyquinoline)cobalt (Coq2) molecules. Journal of magnetism and magnetic materials, 387:155,2015.

【27】王卿璞 and 张锡健.Performance regeneration of InGaZnO transistors with ultra-thin channels. Applied physics letters, 106:093506,2015.

【28】张锡健 and 王卿璞.Performance regeneration of InGaZnO transistors with ultra-thin channels. APPLIED PHYSICS LETTERS, 106:093506,2015.

【29】庞智勇, 张锡健 and 韩圣浩.he Structure of Mn-Doped Tris(8-hydroxyquinoline)gallium by Extended X-ray Absorption Fine Structure Spectroscopy and First Principles Calculations. J. Appl. Phys., 112:113519,2012.

【30】张锡健, 韩圣浩 and 庞智勇.he Structure of Mn-Doped Tris(8-hydroxyquinoline)gallium by Extended X-ray Absorption Fine Structure Spectroscopy and First Principles Calculations. J. Appl. Phys., 112:113519,2012.

【31】张锡健, 韩圣浩 and 庞智勇.he Structure of Mn-Doped Tris(8-hydroxyquinoline)gallium by Extended X-ray Absorption Fine Structure Spectroscopy and First Principles Calculations. J. Appl. Phys., 112:113519,2012.

【32】蒋然, 孟令国 and 张锡健.Atomic layer deposition of an Al2O3 dielectric on ultrathin graphit by using electron beam irradiation. Journal of Semiconductors, 33:093004-1,2012.

【33】孟令国, 张锡健 and 蒋然.Atomic layer deposition of an Al2O3 dielectric on ultrathin graphit by using electron beam irradiation. Journal of Semiconductors, 33:093004-1,2012.

【34】孟令国, 张锡健 and 蒋然.Atomic layer deposition of an Al2O3 dielectric on ultrathin graphit by using electron beam irradiation. Journal of Semiconductors, 33:093004-1,2012.

【35】张锡健.Influence of low temperature annealing on structure and photoelectric properties of MgZnO thin filmsAdv. Mater. Res.,2012.

【36】张锡健.Influence of low temperature annealing on structure and photoelectric properties of MgZnO thin filmsAdv. Mater. Res.,2012.

【37】张锡健 and 庞智勇.Microstructure and magnetic microstructure of La+Co doped strontium hexaferrites. JOURNAL OF ALLOYS AND COMPOUNDS, 492:691,2010.

【38】张锡健 and 庞智勇.Microstructure and magnetic microstructure of La+Co doped strontium hexaferrites. JOURNAL OF ALLOYS AND COMPOUNDS, 492:691,2010.

【39】庞智勇 and 张锡健.Microstructure and magnetic microstructure of La+Co doped strontium hexaferrites. JOURNAL OF ALLOYS AND COMPOUNDS , 492:691,2010.

【40】张锡健 and 王卿璞.Fabrication and optical properties of MgxZn1-xO thin films. Chinese Physics B, 19:018102-1,2010.

【41】张锡健.Fabrication and optical properties of MgxZn1-xO thin films. Chinese Physics B, 19:018102-1,2010.

【42】张锡健 and 王卿璞.Fabrication and refractive indices of MgZnO thin films. Acta Optica Sinica, 29:6,2009.

【43】张锡健.Fabrication and refractive indices of MgZnO thin films. Acta Optica Sinica, 29:6,2009.

【44】张锡健.退火对ZnO薄膜光学特性的影响. 《发光学报》, 29:451,2008.

【45】王卿璞 and 张锡健.Influence of excitation light wavelength on the photoluminescence properties for ZnO films prepared by magnetron sputtering. Applied Surface Science, 254:5100,2008.

【46】张锡健 and 王卿璞.退火对ZnO薄膜光学特性的影响. 《发光学报》, 29:451,2008.

【47】肖洪地, 林兆军, 马瑾, 宗福建 and 张锡健.Thermal stability of GaN powders in the flowing stream of N2 gas. Materials Chemistry and Physics, 106:5,2007.

【48】林兆军, 马瑾, 宗福建, 张锡健 and 肖洪地.Thermal stability of GaN powders in the flowing stream of N2 gas. Materials Chemistry and Physics, 106:5,2007.

【49】林兆军, 马瑾, 宗福建, 张锡健 and 肖洪地.Thermal stability of GaN powders in the flowing stream of N2 gas. Materials Chemistry and Physics, 106:5,2007.

【50】王卿璞 and 张锡健.Structural and optical properties of P-Ga codoping ZnO thin films deposited by magnetron sputtering. Optical Materials, 29:1358,2007.

【51】马瑾, 宗福建, 张锡健 and 肖洪地.Synthesis and structural properties of beta-gallium oxide particles from gallium nitride powder. Materials Chemistry and Physics, 101:99,2007.

【52】马瑾, 宗福建, 张锡健 and 肖洪地.Synthesis and structural properties of beta-gallium oxide particles from gallium nitride powder. Materials Chemistry and Physics, 101:99,2007.

【53】肖洪地, 马瑾, 宗福建 and 张锡健.Synthesis and structural properties of beta-gallium oxide particles from gallium nitride powder. Materials Chemistry and Physics, 101:99,2007.

【54】肖洪地, 栾彩娜, 马瑾, 林兆军, 宗福建 and 张锡健.采用射频磁控溅射法在Si (111) 衬底上生长β-Ga2O3 薄膜. 《功能材料》, v 37:1,2006.

【55】张锡健, 李玉香, 王卿璞, 马瑾, 宗福建 and 肖洪地.The optical properties of MgxZn1-xO thin films. Chinese Physics, 15:2385,2006.

【56】栾彩娜, 马瑾, 林兆军, 宗福建, 张锡健 and 肖洪地.采用射频磁控溅射法在Si (111) 衬底上生长β-Ga2O3 薄膜. 《功能材料》, v 37:1,2006.

【57】李玉香, 王卿璞, 马瑾, 宗福建, 肖洪地 and 张锡健.The optical properties of MgxZn1-xO thin films. Chinese Physics, 15:2385,2006.

【58】马瑾, 林兆军, 宗福建, 张锡健, 栾彩娜 and 肖洪地.采用射频磁控溅射法在Si (111) 衬底上生长β-Ga2O3 薄膜. 《功能材料》, v 37:1,2006.

【59】张锡健, 王卿璞, 马瑾, 宗福建, 肖洪地 and 计峰.退火温度对低温生长MgxZn1-xO薄膜光学性质的影响. ACTA PHYSICA SINICA, 55:437,2006.

专利著作

专利名称 简介 日期

一种顶栅石墨烯场效应晶体管及其制备方法

一种刀具表面涂层的制备方法及制备得到的涂层

一种刀具表面CrN-CrAlSiN阶梯状多元复合涂层及其制备方法

2019/04/02

著作名称 简介 日期

半导体光物理过程

2021/01/01