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Femtosecond laser modification of 6H-SiC crystals for waveguide devices

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Affiliation of Author(s):物理学院

Journal:APPLIED PHYSICS LETTERS

First Author:张彬

Document Code:E1CC39DEE4D74853AAB01B6FA0421A9A

Volume:116

Issue:11

Number of Words:5

Translation or Not:no

Date of Publication:2020-03-16

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