具体研究内容包括:
1、研究高存储密度3D NAND芯片的可靠性特性测试及物理机理
2、探索限制闪存高密度三维集成的本征核心问题:材料与器件
3、研究下一代高密度闪存芯片关键工艺的优化方案与技术
4、结合材料计算与芯片测试研究存储系统的可靠性优化策略
代表性研究成果:
F. Wang, et al., IEEE Access, 9, 47391, 2021;
F. Chen, et al., Micromachines, 12, 1152, 2021;
Y. Kong, et al., IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol. 39, no. 11, pp. 4042-4051, Nov. 2020;
F. Wang et al.,IEEE Electron Device Letter, 41, 8, 1189, Aug. 2020;
F. Wang et al., Applied Physics Express, 13, 054002, May. 2020;
F. Wang et al., Applied Physics Express, 13, 044001, Apr. 2020;
J. Wu et al., J. Phys. D: Appl. Phys. 52, 395103, 2019;
J. Wu et al., IEEE Journal of the Electron Devices Society, vol.7,1, pp.626-631, 2019;
J. Wu et al., IEEE IEDM Tech. Dig.,95-98, 2017;