Project Name: : Y-碳化硅基MOSFET及滤波器制备与关键工艺开发

Affiliation of Participant(s): : 新一代半导体材料研究院

Leading Scientist: : 韩吉胜

Supported by: : 2022年晶体国重基本业务费

Nature of Project: : 纵向

Project level: : 学校级

Project Number: : E31FB01A545F2FA4E053BE07C2CA7AD6

Date of Project Approval: : 2022-06-28

Scheduled completion time: : 2023-12-31

Date of Project Completion: : 2023-12-31

Date of Project Initiation: : 2022-05-20

Project Approval Number: : 42580091012201