Project Name: : SiC表面氧化技术合作项目

Affiliation of Participant(s): : 新一代半导体材料研究院

Leading Scientist: : 韩吉胜

Nature of Project: : 横向

Project Number: : FADB1D929A2C1181E053BE07C2CABA9A

Date of Project Approval: : 2023-04-03

Scheduled completion time: : 2023-11-30

Date of Project Completion: : 2023-11-30

Date of Project Initiation: : 2023-04-03