韩琳
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Enhanced performance of In-Al-Sn-O films and thin film transistors achieved via regulating the RF magnetron sputtering power
  • Institution:
    集成电路学院
  • Title of Paper:
    Enhanced performance of In-Al-Sn-O films and thin film transistors achieved via regulating the RF magnetron sputtering power
  • Journal:
    Materials Research Bulletin
  • First Author:
    冯潇
  • All the Authors:
    冯先进
  • Document Code:
    5540C3F82F6B4094A90FAED580639922
  • Volume:
    186
  • Issue:
    无
  • Page Number:
    113334
  • Number of Words:
    5
  • Translation or Not:
    No
  • Date of Publication:
    2025-06
  • Release Time:
    2025-11-12
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