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一种类氧化硅柔性薄膜的生长方法，张宇，韩琳，ZL2020106399612，2021-09-24
  • Title:
    一种类氧化硅柔性薄膜的生长方法，张宇，韩琳，ZL2020106399612，2021-09-24
  • Institution:
    山东大学
  • Type of Patent:
    发明专利
  • State of Patent:
    授权
  • Application Number:
    2020106399612
  • Authorization Number:
    ZL2020106399612
  • Number of Inventors:
    2
  • Service Invention or Not:
    No
  • Application Date:
    2020-07-06
  • Authorization Date:
    2021-09-24
  • Release Time:
    2024-04-10
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