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一种柔性类氧化硅薄膜生长装置，张宇，韩琳，ZL2020213090488，2021-01-26
  • Affilication of Author(s):
    山东大学
  • First Author:
    hanlin
  • Disigner of the Invention:
    hanlin,hanlin,张宇
  • Type of Patent:
    Utility models
  • State of Patent:
    授权
  • Application Number:
    2020213090488
  • Authorization number:
    ZL2020213090488
  • Number of Inventors:
    2
  • Service Invention or Not:
    no
  • Application Date:
    2020-07-06
  • Authorization Date:
    2021-01-26

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