Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter
发布时间：2021-06-01 点击数：
所属单位：机械工程学院
论文名称：Removal mechanism and surface quality of crystal semiconductor materials in scratching tests with Berkovich indenter
发表刊物：Materials Science in Semiconductor Processing
第一作者：章程
论文编号：40B8D041581C417A9E901BE623065151
卷号：105
是否译文：否
发表时间：2020-01