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Affiliation of Participant(s):新一代半导体材料研究院

Leading Scientist:贾志泰

Supported by:2020年度山东省技术创新引导计划（国家重点科研项目补助和奖励）

Nature of Project:纵向

Project level:省、部委级

Project Number:B79321D39269284DE053BE07C2CA038D

Date of Project Approval:2020-12-11

Scheduled completion time:2021-04-30

Date of Project Completion:2021-04-30

Date of Project Initiation:2020-12-11

Project Approval Number:2018YFB0406502（补助）