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Project Name:高质量氧化镓薄膜外延中的缺陷控制和电学性能调控基础研究

Institution:新一代半导体材料研究院

Leading Scientist:李阳

Nature of Project:纵向

Project Level:省、部委级

Project Number:1AAD07A13C7C25DBE063BE07C2CAB1B6

Project Approval Number:ZR2023ZD05-1

Date of Project Approval:2023-10-31

Scheduled Completion Time:2026-12-31

Date of Project Completion:2026-12-31

Date of Project Initiation:2024-01-01

Release Time:2024-06-18