Optimization of oxygen flow rate toward high-quality ε-Ga2O3 thin films grown on sapphire substrates and solar-blind ultraviolet photodetectors
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Institution:新一代半导体材料研究院
Title of Paper:Optimization of oxygen flow rate toward high-quality ε-Ga2O3 thin films grown on sapphire substrates and solar-blind ultraviolet photodetectors
Journal:OPTICAL MATERIALS
First Author:徐梦凡
Document Code:87392A8124474933A50E229A41CC0C70
Issue:164
Number of Words:6
Translation or Not:No
Date of Publication:2025-04
Release Time:2025-05-28