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Optimization of oxygen flow rate toward high-quality ε-Ga2O3 thin films grown on sapphire substrates and solar-blind ultraviolet photodetectors

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Affiliation of Author(s):新一代半导体材料研究院

Journal:OPTICAL MATERIALS

First Author:徐梦凡

Document Code:87392A8124474933A50E229A41CC0C70

Issue:164

Number of Words:6

Translation or Not:no

Date of Publication:2025-04-24

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