一种含丙烯酸酯侧链的光刻胶材料及其制备方法与应用
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Title:一种含丙烯酸酯侧链的光刻胶材料及其制备方法与应用
Institution:国家胶体材料工程技术研究中心
Type of Patent:Invent
Application Number:202211569972.3
Number of Inventors:1
Service Invention or Not:No
Application Date:2022-12-08
Publication Date:2024-01-05
Authorization Date:2024-01-05
Release Time:2024-05-25