氧分压对直流磁控溅射IGZO 薄膜特性的影响
Release time:2019-04-14
Hits:
- Affiliation of Author(s):
- 信息科学与工程学院
- Journal:
- 《真空科学与技术学报》
- First Author:
- 李玲
- Indexed by:
- Applied Research
- Document Code:
- lw-172060
- Translation or Not:
- no
- Date of Publication:
- 2015-10-01