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氧分压对直流磁控溅射IGZO 薄膜特性的影响

Release Time:2019-04-14
Hits:
Institution:
信息科学与工程学院
Title of Paper:
氧分压对直流磁控溅射IGZO 薄膜特性的影响
Journal:
《真空科学与技术学报》
First Author:
李玲
Document Code:
lw-172060
Translation or Not:
No
Date of Publication:
2015-10
Release Time:
2019-04-14

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