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Effect of sputtering pressure on surface Roughness Oxygen Vacancy and Electrical Properties of a-IGZO Thin Films

Release time:2019-04-14
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Affiliation of Author(s):
信息科学与工程学院
Journal:
Rare Materials and Engineering
First Author:
李玲
Indexed by:
Unit Twenty Basic Research
Document Code:
lw-182376
Translation or Not:
no
Date of Publication:
2016-08-10

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