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Effect of sputtering pressure on surface Roughness Oxygen Vacancy and Electrical Properties of a-IGZO Thin Films

Release Time:2019-04-14
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Institution:
信息科学与工程学院
Title of Paper:
Effect of sputtering pressure on surface Roughness Oxygen Vacancy and Electrical Properties of a-IGZO Thin Films
Journal:
Rare Materials and Engineering
First Author:
李玲
Document Code:
lw-182376
Translation or Not:
No
Date of Publication:
2016-08
Release Time:
2019-04-14

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