采用射频磁控溅射法在Si (111) 衬底上生长β-Ga2O3 薄膜
Release time:2019-10-24
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- Affiliation of Author(s):
- 物理学院
- Journal:
- 《功能材料》
- All the Authors:
- xiaohongdi,luancaina,Ma Jin,linzhaojun,Fujian Zong,Xijian Zhang
- First Author:
- xiaohongdi
- Indexed by:
- Unit Twenty Basic Research
- Document Code:
- lw-73891
- Volume:
- v 37
- Issue:
- n SUPPL.
- Page Number:
- 1
- Translation or Not:
- no
- Date of Publication:
- 2006-10-15