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Affiliation of Participant(s):新一代半导体材料集成攻关大平台

Leading Scientist:xuxiangang

Supported by:工研院协同创新中心

Type of Project:研究与发展成果应用

Nature of Project:纵向

Project level:地(市、州)级

Project Participants:huxiaobo,chenxiufang,pengyan,xumingsheng,xiexuejian,liuxintong

Project Number:A9D03988BFBA6387E053BE07C2CAAC38

Date of Project Approval:2019-09-01

Scheduled completion time:2022-08-30

Date of Project Completion:2022-08-30

Date of Project Initiation:2019-09-01

Project Approval Number:OX2X2019012