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基于模态耦合的MEMS高精度谐振传感方法及器件制作技术研究

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Affiliation of Participant(s):晶体材料研究院

Leading Scientist:刘铎

Supported by:2020年省自然科学基金联合基金

Nature of Project:纵向

Project level:省、部委级

Project Number:BF49429CAD273725E053BE07C2CA1C20

Date of Project Approval:2020-12-16

Scheduled completion time:2023-12-31

Date of Project Completion:2023-12-31

Date of Project Initiation:2021-01-01

Project Approval Number:ZR2020LLZ005

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