Hits:

Project Name:基于模态耦合的MEMS高精度谐振传感方法及器件制作技术研究

Institution:晶体材料研究院（晶体材料全国重点实验室）

Leading Scientist:刘铎

Supported by:2020 Provincial Natural Science Foundation Joint Fund

Nature of Project:纵向

Project Level:省、部委级

Project Number:BF49429CAD273725E053BE07C2CA1C20

Project Approval Number:ZR2020LLZ005

Date of Project Approval:2020-12-16

Scheduled Completion Time:2023-12-31

Date of Project Completion:2023-12-31

Date of Project Initiation:2021-01-01

Release Time:2022-05-26