Microcontact printing fabrication of diamond MEMS cantilevers on silicon substrate
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Institution:新一代半导体材料研究院
Title of Paper:Microcontact printing fabrication of diamond MEMS cantilevers on silicon substrate
Journal:Diamond and Related Materials
First Author:闫彪
Document Code:1787758631589273601
Volume:145
Number of Words:5000
Translation or Not:No
Date of Publication:2024-05
Release Time:2024-09-24