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Affiliation of Author(s):新一代半导体材料研究院
Journal:JOURNAL OF ALLOYS AND COMPOUNDS
First Author:韩素芹
Document Code:F6F2EE51C38A4263B9E8BFAC630D29A3
Volume:934
Number of Words:4
Translation or Not:no
Date of Publication:2023-02-10
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