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一种利用发光二极管阵列实现微悬臂梁高阶共振激发的方法及应用

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Affilication of Author(s):晶体材料研究所

Type of Patent:发明

Application Number:2015100148287

Number of Inventors:14

Service Invention or Not:no

Application Date:2015-01-12

Publication Date:2018-02-13

Authorization Date:2015-01-12

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