一种利用发光二极管阵列实现微悬臂梁高阶共振激发的方法及应用
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Title:一种利用发光二极管阵列实现微悬臂梁高阶共振激发的方法及应用
Institution:晶体材料研究所
Type of Patent:发明
Application Number:2015100148287
Number of Inventors:14
Service Invention or Not:No
Application Date:2015-01-12
Publication Date:2018-02-13
Authorization Date:2015-01-12
Release Time:2018-12-06