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一种利用光热效应实现微悬臂梁共振频率调谐的方法、实现系统及应用

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Affilication of Author(s):晶体材料研究所

Patent Applicant:Duo Liu

Type of Patent:发明

Application Number:2018109469855

Number of Inventors:1

Service Invention or Not:no

Application Date:2018-08-20

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