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一种微悬臂梁传感器的共振激发方法

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Affilication of Author(s):晶体材料研究所

Type of Patent:发明

Application Number:201210104927.0

Number of Inventors:1

Service Invention or Not:no

Application Date:2012-04-11

Publication Date:2014-04-30

Authorization Date:2014-04-30

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