一种微悬臂梁探针二阶共振激发装置
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Title:一种微悬臂梁探针二阶共振激发装置
Institution:晶体材料研究院（晶体材料全国重点实验室）
Type of Patent:Invent
Application Number:201210208242.0
Number of Inventors:1
Service Invention or Not:No
Application Date:2012-06-21
Publication Date:2014-06-18
Authorization Date:2014-06-18
Release Time:2019-04-15