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一种利用激光远程激发微米尺度的微悬臂梁探针共振的方法

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Title:一种利用激光远程激发微米尺度的微悬臂梁探针共振的方法

Institution:晶体材料研究所

Type of Patent:发明

Application Number:201210441902.X

Number of Inventors:1

Service Invention or Not:No

Application Date:2012-11-07

Release Time:2019-04-15

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