基于二次谐波增强的氮化镓器件富镓缺陷检测方法
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Title:基于二次谐波增强的氮化镓器件富镓缺陷检测方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202411803123.9
Number of Inventors:1
Service Invention or Not:No
Application Date:2024-12-10
Publication Date:2025-03-07
Authorization Date:2025-03-07
Release Time:2025-06-12