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基于二次谐波增强的氮化镓器件富镓缺陷检测方法

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Affilication of Author(s):新一代半导体材料研究院

Type of Patent:发明

Application Number:202411803123.9

Number of Inventors:1

Service Invention or Not:no

Application Date:2024-12-10

Publication Date:2025-03-07

Authorization Date:2025-03-07

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