共振激励微谐振器获得高频率稳定性边带的方法
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Title:共振激励微谐振器获得高频率稳定性边带的方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202510059304.3
Number of Inventors:1
Service Invention or Not:No
Application Date:2025-01-15
Publication Date:2025-05-16
Authorization Date:2025-05-16
Release Time:2025-07-16