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利用内共振提升微谐振器模态振幅和温度灵敏度的方法

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Affilication of Author(s):新一代半导体材料研究院

Type of Patent:发明

Application Number:202411942039.5

Number of Inventors:1

Service Invention or Not:no

Application Date:2024-12-27

Publication Date:2025-04-25

Authorization Date:2025-04-25

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