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Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching

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Institution:机械工程学院

Title of Paper:Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching

Journal:Optics and Laser Technology

First Author:王庆伟

Document Code:1737380911723769857

Volume:169

Number of Words:5000

Translation or Not:No

Date of Publication:2024-02

Release Time:2024-10-10

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Professor

Gender : Female

Status : Employed

School/Department : 机械工程学院

Date of Employment : 1996-07-01

Faculty/School : School of Mechanical Engineering

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