Affiliation of Author(s): : 机械工程学院

Title of Paper: : Modeling and optimizing of laser-assisted waterjet process parameters for near-damage-free micromachining of monocrystalline silicon

Journal: : Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

First Author: : 刘雪飞

Document Code: : 090DFE631BA04A5DA5422442448D61D8

Issue: : DOI:10.1177/09544054241245763

Number of Words: : 6273

Translation or Not: : no

Date of Publication: : 2024-04-29